Coating and system expertise for industrial semiconductor applications

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Growing demands on materials, coatings, and system integration

Semiconductor technology faces the challenge of developing increasingly powerful, energy-efficient, and reliable systems and production facilities. Driven by applications in artificial intelligence, power electronics, and advanced packaging, demands on material quality, process stability, and system integration are rising. At the same time, there is a growing need for integrable CVD, PVD, and ALD processes, functional precision coatings, and low-wear, low-contamination coatings for equipment and machine components. Key challenges include thermal management, particle control, material stability, and scalable implementation in industrial production.

Coating and system expertise for equipment, processes, and semiconductor systems

Fraunhofer IST supports the semiconductor industry and its suppliers with comprehensive expertise in coating and surface technology and system expertise – from the coating of process-critical machine components to the integration of functional coatings into semiconductor systems. By combining established coating processes with application-specific functional layers, solutions are created for improved thermal management, products with optimized electrical and optical functions, reduced component wear, and lower contamination. For users, this means higher equipment availability, longer service life, and new degrees of freedom in system design and chip performance.

Realizing solutions for equipment and semiconductor systems together

Benefit from the expertise of Fraunhofer IST – from the coating of individual machine components to the development and integration of innovative coating technologies into semiconductor systems. We support you from the feasibility study through to industrial implementation.

Selected reference project

Reference project

Next-generation leak detection systems for hydrogen

Our focus and expertise

 

Efficient, durable, and robust components for industrial applications

Diamond-based systems

 

Coatings for components and parts in semiconductor manufacturing

Machine components for semiconductor technology

 

Thin-film sensors for industrial applications

Gas sensor technology

Our technologies for developing innovative semiconductor solutions

 

Technologie

Chemische Gasphasenabscheidung

 

Technologie

Physikalische Gasphasenabscheidung

 

Technologie

Atomlagenabscheidung