Gas sensor technology

Thin-film gas sensors for maximum precision and stability

 Nanostructured hydrogen sensor.
© Fraunhofer IST
Nanostructured hydrogen sensor.

Precise and robust gas sensor technology for demanding applications

The reliable detection and analysis of gases is of central importance in many industries, such as process and environmental monitoring, safety technology, and leak detection, as well as in energy, hydrogen, and manufacturing applications. Gas sensors must meet high requirements in terms of sensitivity, selectivity, long-term stability, and robustness, and often need to operate reliably under harsh environmental and process conditions. Conventional sensor designs frequently reach their limits here, for example due to aging or unstable measurement signals.

Customized coating systems and robust concepts for gas sensors at Fraunhofer IST

In the backend sector, Fraunhofer IST develops customized gas sensor coating systems that are specifically tailored to the requirements of various sensor concepts and applications. These systems are based on functional thin-film systems using metal oxides (MOX), which allow the sensor response to be precisely adjusted through material selection and coating design. By combining material development, surface functionalization, and modern coating technologies, metallic, oxide, and ceramic layers are realized using PVD and CVD processes. ALD technology enables the creation of high-precision, ultrathin layers and interface modification. Structured multilayer systems make it possible to precisely adjust the sensitivity, selectivity, and dynamic response of gas sensors and significantly reduce cross-sensitivity. Based on thin-film materials, functional sensor layers, and protective, cover, and barrier coatings, precise, reproducible, and durable solutions for gas sensing are created. Complementary protective and passivation layers reliably shield the sensors from corrosion, particles, chemical stress, and aging, thereby extending their service life and ensuring stable sensor performance even under varying temperature, humidity, and gas conditions.

From the initial material concept to the application-specific sensor design

The Fraunhofer IST supports development projects in gas sensor technology across the entire innovation chain – from material and layer development, through coating on sensor carriers or functional substrates, to adaptation to specific target gases and application scenarios. In addition, the institute supports the development of prototypes, demonstrators, and technology transfer. Thanks to its comprehensive process expertise, both delicate sensor substrates and robust, industry-ready sensor systems can be realized.

Leverage the gas sensor and coating expertise of Fraunhofer IST to collaborate with our experts in developing high-performance, application-specific solutions for your gas detection and analysis tasks.

Our technologies and expertise for robust gas sensor technology

 

Technology

Chemical vapor deposition

 

Technology

Physical vapor deposition

 

Technology

Atomic layer deposition

Selected reference projects

Reference project

Next-generation leak detection systems for hydrogen

Reference project

Silicon layers for MEMS

We offer solutions for your applications

 

Industry solutions

Plant and mechanical engineering, tools

 

Industry solutions

Energy

 

Industry solutions

Environmental technology