Fraunhofer Institute for Surface Engineering and Thin Films IST
Diamond-coated silicon wafer (300 mm) with a layer thickness in the range of min/max (1013 nm/1059 nm).
Machine components for semiconductor technology
Coatings for components and parts in semiconductor manufacturing
Semiconductor production with maximum reliability, purity, and efficiency
The semiconductor industry places the highest demands on production equipment and its components. In highly complex manufacturing processes under cleanroom conditions, machines must operate reliably, precisely, and stably over long periods of time. Downtime, component failure, or particle contamination directly lead to yield losses and are economically unacceptable. Therefore, functional coatings tailored to specific requirements are essential, particularly for machine components such as wafer chucks, handling systems, seals and focus rings, to specifically reduce wear, erosion, particle formation and increase efficiency in semiconductor production.
Coating expertise for high-performance machine components
The Fraunhofer Institute for Surface Engineering and Thin Films IST has many years of expertise in the development and application of functional coatings that can significantly increase the performance and service life of machine components, including those used in semiconductor manufacturing. Customized coating systems such as CVD-Diamond, DLC, or ceramic hard coatings, as well as insulation and barrier coatings, protect against wear, erosion, corrosion, and chemical and thermal stress. At the same time, they reduce friction and particle formation and help ensure the highest purity and reliability in production.
From prototyping and small-batch production to technology transfer
Using industrial CVD, ALD, and PVD coating systems, Fraunhofer IST supports projects from prototyping through small-scale production to technology transfer. In doing so, solutions are developed for both large-format and delicate, complex machine components. For example, the CVDiamond XXL diamond coating system can uniformly coat areas of up to 500 × 1000 mm².
Benefit from our know-how and coating expertise, and work with our experts to develop the right solution for your application in the semiconductor industry.