Hot-wire CVD is a core competence of the Fraunhofer IST and permits in particular the production of crystalline diamond coatings on large surfaces and over complex geometries. Other possibilities include electronic and optical layers on a silicon basis. We develop and research processes and coating systems with application-specific requirement profiles, for example for tools, elements, optical components, photovoltaics, sensors and microsystems. We also offer support in the technology transfer of coating modules, components and systems.
We offer process and coating development for your application and develop complete solutions starting with the selection of suitable base materials, through pre-treatment, coating and process development, and on to analytics, qualification and quality assurance. We offer the transfer of hot-wire CVD technology for diamond and silicon-based coatings through R&D services, small-series feasibility demonstration and the construction of coating modules and systems.
Fully automated HFCVD systems developed at the Fraunhofer IST allow coating on surfaces of up to 1000 x 500 mm². In addition, facilities and processes are available for the diamond-coating of complex components and tools and for internal diamond coating. Possible materials for coating include hard metals, ceramics (especially SiC, Si3N4), refractory metals, silicon and glasses.
Hot-wire CVD also offers decisive advantages in the production of silicon-based coatings compared to commonly used plasma-assisted coating processes:
With our inline systems, areas of up to 600 x 500 mm² can be coated.