Special Equipment

The Fraunhofer IST has a well-equipped coating center for the manufacturing of prototypes and pilot series. Here we provide you with an overview of our equipment.

Low pressure plasma processes

View of the rotary table of the EOSS® sputter system from above.
© Fraunhofer IST
View of the rotary table of the EOSS® sputter system from above.

Chemical vapor deposition

Inline system with 7 compartments for the deposition of silicon and silicon nitride coatings with hot-wire chemical vapour deposition.
© Fraunhofer IST, Rainer Meier, BFF Wittmar
Inline system with 7 compartments for the deposition of silicon and silicon nitride coatings with hot-wire chemical vapour deposition.

Atmospheric pressure plasma systems

The Disc-Jet can also be used to process cavities.
© HAWK
The Disc-Jet can also be used to process cavities.
  • Atmospheric pressure plasma systems for coating and functionalization of large areas (up to 40 cm widths)
  • Microplasma plants for selective functionalization of surfaces (up to Ø = 20 cm)
  • Bond aligner with an integrated plasma tool for wafer pretreatment in the clean room
  • Roll-to-roll set-up for area-selective functionalization of surfaces up to 10 m / min
  • Machine for internal coating of bags or bottles
  • Mobile atmospheric pressure plasma sources
  • S1 bio plasma laboratory with safety workbench
  • Mobile atmospheric pressure plasma sources

Laser technology and microstructuring

Clean room with a laboratory area of 25 m² at the Fraunhofer IST.
© Fraunhofer IST, Falko Oldenburg
Clean room with a laboratory area of 25 m² at the Fraunhofer IST.
  • Laser for 2D and 3D microstructuring
  • Automated system for deposition of polyelectrolyte
  • 2 mask aligner for photolithographic structuring
  • Laboratory for microstructuring (40 m² clean room)
  • Clean room – sensor technology (35 m²)
  •  Laser structuring laboratory (17 m²)
  • Nanosecond dye laser (Nd: YAG-Laser)
  • CO2-Laser and Excimer-Laser
  • EUV spectrography
  • Semiconductor laser
  • Picosecond laser

Electroplating

View to a plant for electroplating of wave guides.
© Fraunhofer IST, Rainer Meier, BFF Wittmar
View to a plant for electroplating of wave guides.
  • System for electroplating metallization of waveguides (11 active baths with a volume of each 140 l and 1 nicke bath with a volume of 400 l)
  • Modular technical electroplating system (20 stations for active baths with a volume of each 20 l)
  • Anodizing plant (11 active baths with a volume of each 140 l and 2 anodizing baths with a volume of each 350 l)

Pretreatment

Multi-chamber system at the Fraunhofer IST for aqueous cleaning with high reproducibility and flexibility in materials to be cleaned.
© Fraunhofer IST, Falko Oldenburg
Multi-chamber system at the Fraunhofer IST for aqueous cleaning with high reproducibility and flexibility in materials to be cleaned.
  • 15-stage cleaning unit for surface cleaning on aqueous basis
  • Glassware cleaning plant
  • Particle beam plant
  • Sputter plant and plasma jets for plasma cleaning

Analytics and quality assurance

X-ray photoelectron spectroscopy at the Fraunhofer IST.
© Fraunhofer IST, Jan Benz
X-ray photoelectron spectroscopy at the Fraunhofer IST.