Fraunhofer Institute for Surface Engineering and Thin Films IST
Coating technology for thin-film sensors
Thin-film sensors for the smart condition monitoring of tomorrow
Reliably Integrating thin-film sensors into applications
Thin-film sensors offer great potential for the intelligent condition monitoring of components and processes. However, their fabrication requires precise and stable coating processes as well as the reliable integration of complex layer systems. At the same time, development times must be shortened and the transferability of the results to industrial manufacturing environments must be ensured.
Modern coating systems as research platforms
As part of the BeSens project, two modern PVD/PACVD coating systems are being set up at Fraunhofer IST and integrated into the existing research infrastructure. These systems enable the development, fabrication, and testing of innovative thin-film sensor systems under conditions that closely mimic real-world scenarios. A key feature is the comprehensive digitization of the systems, which enables continuous process data acquisition, traceability, and data-driven process optimization. This allows for a targeted investigation of the relationships between process control, coating structure, and sensor function.
Faster development, greater process reliability
The new systems enable end-to-end digitized manufacturing with comprehensive process data acquisition and traceability. This allows for the systematic investigation and optimization of relationships between process control, layer structure, and sensor properties. This accelerates the development of new thin-film sensor systems, increases process reliability, and lays the foundation for cost-effective industrial application.
Funding body
