Determination of layer thickness

Determination of layer thickness using a specimen slice.
© Fraunhofer IST
Measurement of layer thickness measurement in practice: Determination of layer thickness using a specimen slice.

Different methods for determination of layer thickness

Depending on the type and thickness of a coating, there are various non-destructive and destructive layer thickness testing methods

1. Profilometric, by measurement of a layer slice

2. By creating a cross-section and using microscope imaging (SEM)

3. By creating and measuring a crater section

4. With the aid of X-ray fluorescence analysis (XRF)

5. Eddy current or magnetic induction

6. X-ray reflectometry (for layer thicknesses of 1 - 200 nm on smooth substrates)

7. EPMA: By determining the mass occupancy of the layers

8. Ellipsometry and photometry for transparent coatings

 

The right procedure for every problem

We provide you with advice as to which method is best suited for your particular problem. Each method has its strengths and weaknesses, is suitable for different coating materials or thicknesses, is more or less complex and delivers different degrees of accuracy. 

Current examples

 

Profilometry

 

High-relolution surface imaging by means of the raster electronic microscope

 

Abrasive wear-testing of surfaces

 

Thickness, density and roughness of ultrathin layer systems

 

Chemical micro-range analysis of surfaces by means of x-ray spectroscopy