
The Fraunhofer IST has two scanning electron microscopes with EDX detectors, as well as an electron beam microprobe (EPMA) with 5 WDX detectors. This enables high-resolution imaging of surfaces and chemical point analysis with micrometer resolution. Advantages of these methods:
The IST has 30 years of experience in the industrial application of these methods, e.g. for damage analysis, material and coating development, corrosion and adhesion problems, market observation, etc.
EPMA Linescan over a spherical graphite precipitation in cast iron. Detection of 0.13 wt.% boron enrichment in the particle shell and 0.03 wt.% phosphorus in the particle interior. Detection limit typically 0.01 at%.
Non-destructive layer thickness determination and simultaneous characterization of the chemical composition of a NiCr/GdTbFe double layer. Comparing measurements using EPMA and independent RBS (Rutherford Backscattering Spectroscopy) measurement shows the high level of accuracy in layer thickness and composition.