EOSS® – Production of optical coatings of the highest quality and with high throughput is no contradiction in terms

View of the rotary table of the EOSS® sputter system from above.
© Fraunhofer IST
Top view of the turntable of the EOSS® sputter system from above.

Deposition of optical interference filters

Interference filters for modern applications in the consumer sector as well as in special applications consist of highly complicated layer designs with different individual thicknesses. These must be deposited with both extreme precision and low defect rates. For the user, the stability of the process and the adjusted layer properties are also of great importance for productivity. This is largely determined by the uniformity of the coating thickness over the component, because this has a direct influence on the spectral characteristics which determine the function.

Innovative coating platform: The EOSS®-coating concept

The Fraunhofer IST uses magnetron sputtering technology for the production of optical coatings. In the EOSS®, the substrates are arranged on a rapidly rotating turntable. Deposition takes place from the metallic or sub-stoichiometric rotating tube target and complete oxidation takes place using a plasma source. The high gas-chamber separation means that it is possible to achieve a permanently stable process without feedback control. Material properties are replicated just as reliably as the layer-thickness distribution over very long periods of weeks and months without readjustment.

Industrial benefit

The EOSS® technology licensed to equipment manufacturers enables the production of new and extremely sophisticated optical coatings on an industrial scale with high process reliability. We also support you with our expertise and demo coatings – please do not hesitate to contact us!

Layer thickness distribution of SiO2 layers after various process steps.
© Fraunhofer IST
Layer thickness distribution of SiO2 layers after various process steps.
Homogeneity of layers (fully loaded) after ten weeks of operation.
© Fraunhofer IST
Homogeneity of layers (fully loaded) after ten weeks of operation.

Selected reference projects

 

Reference project

Scaling up and industrial transfer of the EOSS® optical coating system

 

Reference project

Bandpass filter for Mars Rover Perseverance

 

Reference project

High-precision optical coatings on 3D components

 

Reference project

Optical filters on lenses for compact optical systems