Interference filters for modern applications in the consumer sector as well as in special applications consist of highly complicated layer designs with different individual thicknesses. These must be deposited with both extreme precision and low defect rates. For the user, the stability of the process and the adjusted layer properties are also of great importance for productivity. This is largely determined by the uniformity of the coating thickness over the component, because this has a direct influence on the spectral characteristics which determine the function.
The Fraunhofer IST uses magnetron sputtering technology for the production of optical coatings. In the EOSS®(Enhanced Optical Sputtering System), the substrates are arranged on a rapidly rotating turntable. Deposition takes place from the metallic or sub-stoichiometric rotating tube target and complete oxidation takes place using a plasma source. The high gas-chamber separation means that it is possible to achieve a permanently stable process without feedback control. Material properties are replicated just as reliably as the layer-thickness distribution over very long periods of weeks and months without readjustment.
The EOSS® technology licensed to equipment manufacturers enables the production of new and extremely sophisticated optical coatings on an industrial scale with high process reliability. We also support you with our expertise and demo coatings – please do not hesitate to contact us!