In secondary ion mass spectrometry (SIMS), the sample surface is ablated layer by layer with an ion beam. A mass spectrometer allows the chemical characterization of the ablated material, resulting in a depth profile of the chemical composition. Technical Information:
The Fraunhofer IST achieves a high quantification accuracy for secondary ion mass spectrometry (SIMS) by using special procedures. A particular strength is the quantitative depth profile analysis of hydrogen in carbon-based layers.
Further fields of application are:
We offer the analysis of various types of layers:
Wear-protection layer consisting of a Ti adhesion layer, a TiN intermediate layer, a stepped TiNC gradient and a TiCN(H) functional layer.
Analysis of optical multilayer coatings, e.g. double Ag-Low-E coating systems. The figure shows double Ag-Low-E layer system consisting of different oxide and metallic layers with thicknesses between 3 and 30 nm.
The mechanical and tribological properties of Diamond-Like Carbon (DLC) coatings are determined by the hydrogen content of the carbon top layer. By means of SIMS analysis and DLC layer analysis, this H content can be quantitatively determined.
SIMS analysis can be used to quantify the depth profiles of curved surfaces. It is of particular importance to adjust the measuring position with extreme care.