In secondary ion mass spectrometry (SIMS), the sample surface is ablated layer by layer with an ion beam. A mass spectrometer allows the chemical characterization of the ablated material, resulting in a depth profile of the chemical composition. Technical Information:
IST achieves a high quantification accuracy for SIMS by using special procedures. One particular strength is the quantitative determination of hydrogen in carbon-based layers.
Further fields of application are:
Wear-protection layer consisting of a Ti adhesion layer, a TiN intermediate layer, a stepped TiNC gradient and a TiCN(H) functional layer.
Double Ag low-E layer system consisting of various oxide and metallic layers with thicknesses between 3 and 30 nm.
The mechanical and tribological properties of Diamond-Like Carbon (DLC) coatings are determined by the hydrogen content of the carbon top layer. This H content can be determined quantitatively by means of SIMS.
SIMS can be used to quantify the depth profiles of curved surfaces. It is of particular importance to adjust the measuring position with extreme care.