
In secondary ion mass spectrometry (SIMS), the sample surface is ablated layer by layer with an ion beam. A mass spectrometer allows the chemical characterization of the ablated material, resulting in a depth profile of the chemical composition. Technical Information:
IST achieves a high quantification accuracy for SIMS by using special procedures. One particular strength is the quantitative determination of hydrogen in carbon-based layers.
Further fields of application are:
SIMS can be used to quantify the depth profiles of curved surfaces. It is of particular importance to adjust the measuring position with extreme care.
More information on the depth profile analysis on curved surfaces with SIMS