With optical interference coating systems it is possible to provide surfaces with different optical functions such as reflection reduction or enhancement and spectrally selective filters. Production methods normally used for such coating systems include vacuum-based coating processes such as evaporation techniques, various types of sputter deposition, and plasma-enhanced chemical vapor deposition processes (PECVD). The energy input affecting on the substrate during coating is often critical for organic substrates such as, for example, polymer films. However, due to their bendability and low weight, films of this kind offer new application possibilities, for example, in the field of consumer optics. Optimized coating processes for high-quality optical interference coating systems on polymer films are therefore under development at the Fraunhofer IST.