The scanning electron microscope with focused ion beam, known as the FIB method, makes new insights possible under the surface of materials. In order to examine microscopic defects, point corrosion, cracks or artificial microstructures even underneath the surface and clarify the cause of defects where applicable, the location of a possible defect is first determined with the scanning electron microscope (SEM). Then the surface is cut open vertically using a finely focused ion beam with visual control. The material is removed on one side of the cut face with the ion beam so that looking diagonally at the cut face is subsequently possible. The benefit of using the FIB is that the cut face and be positioned with sub-micrometer accuracy so that even the smallest structures in the cross-section can be represented.
You will find the technical data of the FIB used by Fraunhofer IST here.