GDOES

GDOS depth profile of carbonitrided steel
© Fraunhofer IST

30 µm depth profile of carbonnitrided steel.

Glow discharge optical emission spectroscopy (GDOES) is a process for determining the chemical composition as a function of the depth for film thicknesses from a few 100 nm up to 10-50 µm. An Ar plasma is ignited over the surface of the specimen and the material is removed at a relatively high rate. The atoms that are removed are excited and therefore emit light in the visible spectrum that is measured with numerous spectrometers. With suitable calibration, the concentration of the elements in the sample can be determined from the intensity of the emitted light. The lateral resolution of this method is low (measuring spot diameter approximately 5 mm). On the other hand, the depth resolution can be in the range of 10 nm. GDOES is a fast process that is especially well suited for “thick” films such as galvanic and nitriding films or similar.

Glow discharge optical emission spectroscopy (GDOES) is a process for determining the chemical composition as a function of the depth for film thicknesses from a few 100 nm up to 10-50 µm. An Ar plasma is ignited over the surface of the specimen and the material is removed at a relatively high rate. The atoms that are removed are excited and therefore emit light in the visible spectrum that is measured with numerous spectrometers. With suitable calibration, the concentration of the elements in the sample can be determined from the intensity of the emitted light. The lateral resolution of this method is low (measuring spot diameter approximately 5 mm). On the other hand, the depth resolution can be in the range of 10 nm. GDOES is a fast process that is especially well suited for “thick” films such as galvanic and nitriding films or similar.