Kinetic plasma and transport simulation for low-pressure processes

Direct Simulation Monte Carlo DSMC of thermal vaporisation.
© Fraunhofer IST
Direct Simulation Monte Carlo DSMC of thermal vaporisation.

Gas flow and plasma simulation in combination with long-term process experience

Fraunhofer IST has long term experience in modelling of industrial deposition coaters and experimental validation. The experience enables us to perform meaningful simulation case studies for novel coater concepts and judge the applicability of results. Besides of simulation studies we are also offering know-how transfer via courses, hands-on training workshops and licensing of our DSMC (Direct Simulation Monte Carlo) / PICMC (Particle-in-Cell-Monte Carlo) simulation software.

Model based product and process improvement, improved process knowledge

Product and process simulation enable to perform feasibility and optimization studies and require minimal experimental effort. This also includes to create execution examples for patent applications. DSMC and PIC-MC simulation allows to predict the plasma dynamics, deposition rate uniformity and film stoichiometry in 3D coater geometries and thus are a basis for decision making in the development of coater components and processes.

Further information


Upscaling of PECVD-Prozesses


Simulation of optical precision coatings on curved components


Direct Simulation Monte Carlo of HWCVD silicon deposition processes