Shenzhen, China  /  November 21, 2019  -  November 23, 2019

5th Vacuum Coatings Conference Shenzhen VCCS 2019 (Winter)

Venus Royal Hotel

Shenzhen in the People's Republic of China is an important vacuum industry location. For the fifth time the Vacuum Coatings Conference Shenzhen takes place here, providing a platform to leading industrial suppliers in the global market of vacuum coatings to exchange their knowledge and to get in touch.

The focus of the VCCS is on hard coatings and high-end applications. The most important areas are tribological coatings for automotive applications as well as the development of new materials and coating systems.

Dr. Lothar Schäfer, deputy director of the Fraunhofer IST, will participate in the scientific program of this year's VCCS Winter, which will take place in the Chinese city of Shenzehn. His lecture on ”Fabrication of precision optical components and thin film sensors by integrated processes” highlights two examples addressing high quality optical coatings and thin film sensors.


”Fabrication of precision optical components and thin film sensors by integrated processes”


L. Schäfer

Increasing requirements for product quality as well as new sustainable production concepts imposed by digitalization offer excellent opportunities for vacuum coating processes. Vacuum coating processes benefit extremely by applying process simulation in combination with model driven process monitoring, while the integration of vacuum-based thin film sensors into production systems is of great interest for end-users and manufacturing industry, respectively. The presentation will highlight two examples addressing high quality optical coatings and thin film sensors.

Increasing demands for optical components resulted in the development of a production system for the deposition of high precision optical coating systems at Fraunhofer IST. The patented »Enhanced Optical Sputtering System - EOSS®« uses rotatable cathodes and compound assisted sputtering (CARS) to guarantee highest reproducibility and process stability for uniform coatings simultaneously on 10 substrates with 8 inch in diameter. The »Modular Coating Control Application  MOCCA®« integrates process monitoring and control. Kinetic process modelling and optimization  of the sputtering processes yield a film thickness distribution required for the production of gradient optical coatings on 3D optical components according to the desired multilayer systems. Key features of the EOSS® and examples of optical components will be presented.

Thin film sensors play an increasing role in the digitalization of future production processes. They can be integrated directly into the surfaces of machine components and products  thus providing data on their status for further processing with the aim of production process automation and cyber-physical systems. In addition, thin film sensors usually do not influence the performance of the machine components despite they are applied in the zone of exposure. Thin film sensor signals from products are used to assess their condition for secure operation or use, respectively. The principles of the production steps for thin film sensors and examples for their applications are presented.