Laser plasma hybrid technology

Laser plasma hybrid technology optimizes surfaces and processes

Laser and plasma – combining these technologies for surface optimization and surface engineering makes it possible to process numerous materials precisely and homogeneously on larger surfaces with high productivity and at lower cost. The combination of the two technologies also supports the exact and efficient micro-structuring of optical components. This innovative laser plasma hybrid technology opens up a broad range of new application possibilities for surface optimization. Production and machining processes – depending on the desired application – become more efficient with higher quality and therefore more economical.

Serial or simultaneous laser-plasma hybrid processes are possible depending on the application and substrate. Here the materials that are used can exhibit conductive, semiconductive or also insulating properties.

Benefits of laser plasma hybrid technology

  • Cost-effective and energy-efficient
  • Easy to integrate into existing processes and methods
  • Shorter cycle and process times
  • Improved quality compared to previous methods


  • Highly efficient material processing, for example by reducing the required laser energy, increasing the ablation rate, improving the surface roughness and reducing debris
  • Structuring of optically transparent materials such as borosilicate, quartz glass etc.
  • Low-energy annealing

Production technology and engineering – what we offer

Experienced scientists, engineers and technicians at the Application Centre for Plasma and Photonics of Fraunhofer IST at the Göttingen location develop fundamentals, conduct feasibility and parameter studies, produce small series and develop pilot plants that meet the highest standards in industry and research. The Application Centre for Plasma and Photonics also conducts ongoing research of promising methods focusing on the topics of micro-structuring, surface modification and cleaning:


  • Shaping
  • Cutting
  • Drilling
  • Finishing


  • Removing process residues (such as oil and grease)
  • Selective layer ablation and substrate protection

Surface modification

Smoothing/polishing, activation and functionalization of metals, glass, ceramics and plastics for

  • superfinish machining of bearing surfaces and optical surfaces,
  • improving adhesion properties.

Process and system development

  • Development of economical production scenarios as comprehensive solutions
  • Layout and development of adapted system concepts integrated into production
  • Support in the construction and putting into operation of laser-plasma hybrid systems


Our expertise accumulated over many years and our broad selection of equipment and systems also allow us to work with a wide variety of materials:

  • Metals
  • Ceramics
  • Glass
  • Plastics