The Fraunhofer IST designs and builds PVD and CVD coating sources based on the hollow cathode glow discharge. These sources are used to develop high-rate coating processes for specific customer requirements, such as for the deposition of magnetic, catalytic or piezoelectric materials, high-temperature-resistant oxides, or metal-ceramic composites. In total nine coating systems with hollow-cathode-based PVD sources (up to 500 mm in length) are available at the Fraunhofer IST for customers.
- Integration of hollow cathode sources to existing systems
- Design and construction of customer-specific solutions
- Development and evaluation of coating processes on industrial plants
- Characterization of the coatings