Systems and components

With the Enhanced Optical Sputtering System – EOSS^®, Fraunhofer IST has a highly modern system available for the production of precise optical interference filter systems.

With the Modular Optical Coating Control Application (MOCCA^+®) monitoring system developed at Fraunhofer IST, the entire manufacturing process for optical interference filter systems can be monitored and automated.

With the Megatron^® coating module developed at Fraunhofer IST, the sputtering rate during the coating process can be increased significantly.  

Fraunhofer IST has various hollow cathode sources available, for example gas flow sputtering sources for the precipitation of erosion protection and hard magnetic films among others.    

At the Fraunhofer IST an innovative plasma source concept has been developed which permits laminar and contoured as well as depth processing, even of temperature-sensitive substrates.

Different plasma modules and individual systems, developed at the Fraunhofer IST, make many new applications possible by using cold atmospheric pressure plasmas.