Fraunhofer IST uses photolithography and laser structuring in the field of microstructuring. These technologies support the additive production of microstructures using the lift-off method. Here the work piece surface is first coated and then structured. Then the masking is removed and the structures remain on the surface. Subtractive processing is also possible. Here the entire work piece surface is metallized in the first step and then the structural contours are inscribed or defined using photolithography and etching techniques. Structures in the range of a few micrometers can be produced in this way. Application examples include temperature, force, wear, gas and bio-sensors as well as 3D-MID technology.