A parallel Particle-in-Cell Monte-Carlo (PIC-MC) simulation software was developed and implemented at Fraunhofer IST, supporting the modelling of gas flows and gas discharges in all system geometries with spatial and time resolution. The PIC-MC simulation method is based on reproducing the movements and collisions of representative simulation particles and is particularly well suited for the low-pressure range. Various wall types such as pumps, chemically active surfaces, particle sources and so on are available for taking wall collisions into account. This permits the realistic representation of complex systems with their external, physical parameters in the simulation model.
Relevant results include:
- Pressure and charge density distributions
- Electrical potential
- Particle flow densities
- Energy distribution on the substrate
These values are determined by means of ensemble and time averaging across the simulation particles, and reflect the growth conditions in detail depending on the process parameters.