Nano-indentation permits the local determination of hardness and the modulus of elasticity on ultra-thin films (> 300 nm) with a lateral resolution in the micrometer range, and thereby also enables local hardness measurements or hardness mappings on inhomogeneous specimens. In addition, the viscoelastic properties of polymer films or for example the self-healing behaviour of scratches in coatings can be characterized by means of creep or relaxation tests. Micro-indentation (Fischerscope) can be used for thicker films > 3 µm. This also allows the Vickers, Martens or universal hardness to be determined.