Confocal laser microscope CLM
The confocal laser microscope supports three-dimensional optical surface imaging. An image is generated by moving the very sharply defined focus level vertically through the object. The lateral resolution is in the 1 μm range and the height resolution is in the range of a few nanometres. This method delivers quantitative information within a few minutes, among other things about surface topography, roughness, step heights, pitch angles or particle sizes. It is much faster compared to profilometric methods and can also be used for the imaging of soft or unstable surfaces such as polymers or powders. Measuring through transparent surface layers is also possible to a certain extent.