BEGIN:VCALENDAR
VERSION:2.0
PRODID:-//Fraunhofer-Gesellschaft//Fraunhofer Institute for Surface Enginee
 ring and Thin Films IST//ENGLISH
BEGIN:VEVENT
UID:69fda93e-3dda-4d36-8a70-f3fbc1ede337
DTSTAMP:20260915T121734Z
SUMMARY:Plasma Process Simulation Tools for Industrial Coating and Etching 
 Systems
DTSTART:20270126T230000Z
DTEND:20270128T130000Z
END:VEVENT
END:VCALENDAR