BEGIN:VCALENDAR
VERSION:2.0
PRODID:-//Fraunhofer-Gesellschaft//Fraunhofer Institute for Surface Enginee
 ring and Thin Films IST//ENGLISH
BEGIN:VEVENT
UID:c58ca0c0-ecc9-4be6-90ca-cda7e7a8ad6b
DTSTAMP:20260811T230655Z
SUMMARY:Plasma Process Simulation Tools for Industrial Coating and Etching 
 Systems - Latest Developments and Future Trends ​
DTSTART:20260127T230000Z
DTEND:20260129T130000Z
END:VEVENT
END:VCALENDAR