Shenzhen, China  /  21.11.2019  -  23.11.2019

5. Vacuum Coatings Conference Shenzhen VCCS 2019 (Winter)

Venus Royal Hotel

Shenzhen in der Volksrepublik China ist ein wichtiger Standort der Vakuum-Industrie. Zum fünften Mal findet hier die Vacuum Coatings Conference Shenzhen statt, die eine Plattform für den Austausch und die Vernetzung führender industrieller Anbieter im globalen Markt der Vakuumbeschichtungen darstellt.

Der Fokus der VCCS liegt auf Hartbeschichtungen und High-End-Anwendungen. Die wichtigsten Bereiche bilden tribologische Beschichtungen für Automobilanwendungen sowie die Entwicklung von neuen Materialien und Schichtsystemen.

Der stellvertretende Institutsleiter des Fraunhofer IST, Dr. Lothar Schäfer, beteiligt sich mit einem Vortrag zum Thema »Fabrication of precision optical components and thin film sensors by integrated processes« am wissenschaftlichen Programm der diesjährigen Vacuum Coatings Conference Shenzhen VCCS Winter. Mit seinem Beitrag stellt er zwei Anwendungsbeispiele aus dem Bereich der Vakuumbeschichtung am Fraunhofer IST vor und präsentiert Entwicklungsergebnisse zu präzisionsoptischen Beschichtungen und Dünnschichtsensoren. 

 

Montag, 3. September 2018

 

»Fabrication of precision optical components and thin film sensors by integrated processes«

L. Schäfer

Increasing requirements for product quality as well as new sustainable production concepts imposed by digitalization offer excellent opportunities for vacuum coating processes. Vacuum coating processes benefit extremely by applying process simulation in combination with model driven process monitoring, while the integration of vacuum-based thin film sensors into production systems is of great interest for end-users and manufacturing industry, respectively. The presentation will highlight two examples addressing high quality optical coatings and thin film sensors.

Increasing demands for optical components resulted in the development of a production system for the deposition of high precision optical coating systems at Fraunhofer IST. The patented »Enhanced Optical Sputtering System - EOSS®« uses rotatable cathodes and compound assisted sputtering (CARS) to guarantee highest reproducibility and process stability for uniform coatings simultaneously on 10 substrates with 8 inch in diameter. The »Modular Coating Control Application  MOCCA®« integrates process monitoring and control. Kinetic process modelling and optimization  of the sputtering processes yield a film thickness distribution required for the production of gradient optical coatings on 3D optical components according to the desired multilayer systems. Key features of the EOSS® and examples of optical components will be presented.

Thin film sensors play an increasing role in the digitalization of future production processes. They can be integrated directly into the surfaces of machine components and products  thus providing data on their status for further processing with the aim of production process automation and cyber-physical systems. In addition, thin film sensors usually do not influence the performance of the machine components despite they are applied in the zone of exposure. Thin film sensor signals from products are used to assess their condition for secure operation or use, respectively. The principles of the production steps for thin film sensors and examples for their applications are presented.