Mons, Belgien / 7.2.2018 - 8.2.2018
Plasma Diagnostics and Modelling Workshop
8. Februar 2018; 11.00 - 11.40 Uhr. Dr. Ralf Bandorf, Gruppenleiter »Hochionisierte Plasmen und PECVD« am Fraunhofer IST, hält im Rahmen des Plasma Diagnostics and Modelling Workshops einen Vortrag zum Thema »Industrialization of HIPIMS«, in dem er die Entwicklung der Technologie von den Anfängen bis zum heutigen Standard darstellt:
High Power Impulse Magnetron Sputtering HIPIMS has gained international academic interest since the seminal publication in 1999. Ever since fundamental aspects of HIPIMS have been studied. Besides the academic investigations, also industrial progress was made with respect to hardware and coatings. Today, at least ten different companies offer commercial HIPIMS power supplied worldwide. Diagnostic tools, as well as advanced strategies for process control and commercial solutions are available.
The presentation will focus on trends in research and development towards commercial products. Solutions and strategies for active feedback control for reactive processes will be discussed, as well as aspects of process transfer and scale up. Examples of processes and coatings close to application will be presented. The talk will close with an overview on published industrial coating systems and existing HIPIMS coatings.