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| Name Index of Carbon Coatings | ||||
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| Classification of carbon films | ||||
| Carbon films | ||||||||||||||
| Designation | 1 Plasma- polymer films |
2 Amorphous carbon films (diamond-like-carbon films / DLC) | 3 Crystalline carbon films | |||||||||||
| Diamond films | Graphite films |
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| Thin film / thick film |
Thin film | Thin film | Thin film | Thick film (free standing) |
Thin film | |||||||||
| Doping, additional elements |
hydrogen-free | hydrogenated | undoped | doped | undoped | doped | undoped | |||||||
| modified | modified | |||||||||||||
| with metal | with metal | with non-metal |
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| Crystal size on the growth side |
./. | (amorphous) | 1 to 500 nm, nano- crystalline |
0.5 to 10 µm, mikro- crystalline |
0.1 to 5 µm |
(5 µm to) 80 to 500 µm |
80 to 500 µm |
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| Predomina- ting C-C- bond type |
sp2 or sp3, linear bond |
sp2 | sp3 | sp2 | sp2 or sp3 | sp3 | sp2 | sp2 | sp3 | sp3 | sp3 | sp3 | sp3 | sp2 |
| Film No. | 1 | 2.1 | 2.2 | 2.3 | 2.4 | 2.5 | 2.6 | 2.7 | 3.1 | 3.2 | 3.3 | 3.4 | 3.5 | 3.6 |
| Designation | Plasma- polymer film |
Hydrogen- free amorphous carbon film |
Tetrahedral hydrogen- free amorphous carbon film |
Metal- containing hydrogen- free amorphous carbon film |
Hydrogenated amorphous carbon film |
Tetrahedral hydrogenated amorphous carbon film |
Metal- containing hydrogenated amorphous carbon film |
Modified hydrogenated amorphous carbon film |
nano- crystalline CVD diamond film |
micro- crystalline CVD diamond film |
doped CVD diamond film |
CVD diamond |
doped CVD diamond |
graphite film |
| Recom- mended abbreviation |
./. | a-C | ta-C | a-C:Me | a-C:H | ta-C:H | a-C:H:Me (Me = W, Ti, ...) |
a-C:H:X (X = Si, O, N, F, B, ...) |
./. | ./. | ./. | ./. | ./. | ./. |
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| © 2009 Fraunhofer IST |
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